| Time | Session | 
|---|---|
| 
                            
                                                         10:30 
                            
                                                        10:45 
                                                     | 
                                                                |
| 
                            
                                                         10:45 
                            
                                                        11:00 
                                                     | 
                                                                
                         
                                Numerical Study on Optimization of Hazardous Gas Distribution in Cleanroom during Preventive Maintenance of Semiconductor Process Equipment                             
                            
                            
                            
                            
                                                     | 
                    
| 
                            
                                                         11:00 
                            
                                                        11:15 
                                                     | 
                                                                |
| 
                            
                                                         11:15 
                            
                                                        11:30 
                                                     | 
                                                                |
| 
                            
                                                         11:30 
                            
                                                        11:45 
                                                     | 
                                                                
                         
                                Optical Properties of Wood Combustion Emitted Particles Determined by the New, 9? Aethalometer                             
                            
                            
                            
                            
                                                     | 
                    
| 
                            
                                                         11:45 
                            
                                                        12:00 
                                                     | 
                                                                |
| 
                            
                                                         12:00 
                            
                                                        12:15 
                                                     |